Elastic bending and water cooling strategies for producing high-quality synchrotron radiation mirrors in silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3152, Issue , 1997, Pages 88-95

  Underwood, James H ^a   Batson, Phillip J ^a   Beguiristain, H R ^a   Gullikson, Eric M ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING WATER; ELECTROMAGNETIC WAVES; LIGHT; LIGHT SOURCES; LIGHTING; MECHANICAL PROPERTIES; NONMETALS; POLYSILICON; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SINGLE CRYSTALS; SYNCHROTRON RADIATION; SYNCHROTRONS;

ADVANCED LIGHT SOURCE (ALS); BEAM LINES; DESIRABLE PROPERTIES; ELASTIC BENDING; HEAT LOADS; HIGH THERMAL; MECHANICAL STRENGTHS; POLYCRYSTALLINE SILICON (P-SI); PRODUCTION FACILITIES; SEMICONDUCTOR INDUSTRIES; SILICON MIRRORS; SINGLE CRYSTAL SILICON (SCS); UNDULATOR; WATER COOLING;

MIRRORS;

EID: 12844260124     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.295550     Document Type: Conference Paper

References (10)

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