Characterization of thermal distortion effects on beamline optics for EUV interferometry and soft x‐ray microscopy

Review of Scientific Instruments

Volumn 67, Issue 9, 1996, Pages 3354-3355

  Beguiristain, R ^a   Underwood, J H ^a   Koike, M ^a   Batson, P ^a   Medecki, H ^a   Rekawa, S ^a   Jackson, K ^a   Attwood, D ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

ADVANCED LIGHT SOURCE; COOLING; DEFORMATION; EXTREME ULTRAVIOLET RADIATION; GRATINGS; HEATING LOAD; INTERFEROMETRY; MEMBRANES; MICROSCOPY; MIRRORS; OPTICAL SYSTEMS; SOFT X RADIATION; SYNCHROTRON RADIATION; X RAY EQUIPMENT

Indexed keywords

EID: 85024803777     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1147403     Document Type: Conference Paper

References (0)