Detection of heavy - Metal contamination in semiconductor processes using a carrier lifetime measurement system

R and D: Research and Development Kobe Steel Engineering Reports

Volumn 52, Issue 2, 2002, Pages 87-93

  Sumie, Shingo ^a   Takamatsu, Hiroyuki ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; ELECTRIC CORONA; HEAVY METALS; SILICON CARBIDE; SILICON ON INSULATOR TECHNOLOGY; TIME MEASUREMENT;

CARRIER LIFETIME MEASUREMENT SYSTEM; CORONA CHARGE; SEMICONDUCTOR PROCESSES;

SEMICONDUCTOR MATERIALS;

EID: 12744281943     PISSN: 03738868     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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