Design and fabrication of the detector technology for SCUBA-2

IEE Proceedings: Science, Measurement and Technology

Volumn 151, Issue 2, 2004, Pages 110-120

  Walton, A J ^a   Parkes, W ^a   Terry, J G ^a   Dunare, C ^a   Stevenson, J T M ^a   Gundlach, A M ^a   Hilton, G C ^b   Irwin, K D ^b   Ullom, J N ^b   Holland, W S ^c   Duncan, W D ^c   Audley, M D ^c   Ade, P A R ^d   Sudiwala, R V ^d   Schulte, E ^e  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c Science and Technology Facilities Council   (United Kingdom)

^d UNIVERSITY OF WALES   (United Kingdom)

^e RAYTHEON COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; BONDING; ETCHING; MICROMACHINING; OPTICAL DESIGN; OPTICAL SENSORS; SEMICONDUCTING INDIUM; SEMICONDUCTING SILICON; SILICON NITRIDE; SILICON ON INSULATOR TECHNOLOGY; SQUIDS; TELESCOPES;

BUMP BONDING; SILICON MICROMACHINING; SUBMILLIMETER COMMON USER BOLOMETER ARRAY; TRANSITION EDGE SENSOR;

INFRARED DETECTORS;

EID: 12744252484     PISSN: 13502344     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-smt:20040088     Document Type: Article

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