Thermo-optically tunable thin film devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5225, Issue , 2003, Pages 1-6

  Domash, Lawrence H ^a  

^a Aegis Semiconductor Inc   (United States)

Author keywords

Multiple cavity filters; Thermo optic; Thin films; Tunable filters; WDM

Indexed keywords

AMORPHOUS SILICON; COATINGS; INSERTION LOSSES; LIQUID CRYSTALS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; OPTICAL FILTERS; OPTIMIZATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR MATERIALS; SILICON NITRIDE; THERMAL CONDUCTIVITY; THIN FILMS; WAVELENGTH DIVISION MULTIPLEXING;

MULTIPLE CAVITY FILTERS; THERMO-OPTIC COEFFICIENTS; TUNABLE FILTERS;

THIN FILM DEVICES;

EID: 1242310531     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.503620     Document Type: Conference Paper

References (13)

1. M. Lequime, R. Parmentier, F. Lemarchand, C. Amra, "Toward tunable thin-film filters for wavelength division multiplexing applications," Appl. Opt. vol. 41, pp. 3277-3284, June, 2002.
2. Reviews of polymer waveguides may be found in Linear Optical Properties of Waveguides and Fibers, Proc. SPIE Vol. 3799, Bellingham, WA, 1999.
3. Cocorullo, Della Corte et al, "Amorphous silicon waveguides and light modulators by PECVD," Opt. Lett. V. 21, 24, p.2002, 1996.
4. Cocorullo, Della Corte et al, "Fast infrared light modulation in a-Si:H micro-devices," J. Non-crystalline Sol., v. 266, p. 1247, 2000.
5. Cocorullo, Della Corte, De Rosa, Rendina, Rubino and Terzini, "Amorphous Si-based guided-wave passive and active devices," IEEE J. Sel. Topics Quant. Elect., v.4, 6, p.997, 1998.
6. Cocorullo, Della Corte et al, "Measurement of the thermo-optic coefficient of a-Si:H at 1500 nm," J. Non-crystalline Sol, v. 299, p. 310, 2002.
7. Handbook of Thermo-Optic Coefficients of Optical Materials and Applications, G. Ghosh, Academic Press, New York, 1998.
8. H. Li, J. Phys. Chem. Ref. Data, v.9, 561, 1980.
9. Della Corte et al, "Study of the thermo-optic effect in hydrogenated amorphous silicon," Appl. Phys. Lett., v.79, 2, p. 168, 2001.
10. A. Payne and S. Wagner, Appl. Phys. Lett., v.76, 20, p.2949, 2000.
11. Takagi, Hayashi, Payne, Futako, Nishimoto, Takai, Kondo, and Matsuda, "High-rate growth of stable a-Si:H," Mat. Res. Soc. Symp. Proc. v.557, p. 105, 1999.
12. L. Martinu, "Plasma deposition of optical films and coatings: a review," J. Vac. Sci. Technol. A18(6), p.2629, 2000.
13. H. Takashashi, "Temperature stability of thin-film narrow-band pass filters produced by ion-assisted deposition," Appl. Opt., vol. 34, pp. 667-675, Feb. 1995.