The effect of chlorine on dopant activation in hydrogenated amorphous silicon

Applied Physics Letters

Volumn 76, Issue 20, 2000, Pages 2949-2951

  Payne, Adam M ^a   Wagner, Sigurd ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000019183     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126526     Document Type: Article

References (9)

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