Contrast at Very Low Energies of the Gold/Carbon Specimen for Resolution Testing

Scanning

Volumn 26, Issue 1, 2004, Pages 18-24

  Müllerová, Ilona ^a   Frank, Luděk ^a,b  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

^b ISI AS CR   (Czech Republic)

Author keywords

Cathode lens; Image contrast; Resolution testing; Scanning electron microscope; Very low energy

Indexed keywords

DATA REDUCTION; IMAGE ANALYSIS;

ELECTRON MICROGRAPHS; IMAGE RESOLUTION;

GOLD;

CARBON; GOLD;

ARTICLE; CONTRAST; ELECTRON; ENERGY; FIELD EMISSION; IMAGING; MATHEMATICAL ANALYSIS; MICROSCOPE; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 1242296761     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950260104     Document Type: Article

References (16)

1. th Int Congr El Microsc Cancun, 1, 437-438 (1998)
2. Bauer E: Low energy electron microscopy. Rep Prog Physics 57, 895-938 (1994)
3. Beamson G, Porter HQ, Turner DW: The collimating and magnifying properties of a superconducting field photoelectron spectrometer. J Phys E Sci Instrum 13, 64-66 (1980)
4. Böngeler R, Golla U, Kässens M, Reimer L, Schindler B, Senkel R, Spranck M: Electron-specimen interactions in low-voltage scanning electron microscopy. Scanning 15, 1-18 (1993)
5. Chung MS, Everhart TE: Simple calculation of energy distribution of low-energy secondary electrons emitted from metals under electron bombardment. J Appl Phys 45, 707-709 (1974)
6. Frank L, Müllerová I, Faulian K, Bauer E: The scanning low-energy electron microscope: first attainment of diffraction contrast in the scanning electron microscope. Scanning 21, 1-13 (1999)
7. Kruit P, Read FH: Magnetic field parallelizer for 2π electron-spectrometer and electron-image magnifier. J Phys E Sci Instrum 16, 313-324 (1983)
8. Kruit P, Venables JA: High-spatial-resolution surface-sensitive electron spectroscopy using a magnetic parallelizer. Ultramicroscopy 25, 183-194 (1988)
9. th Int Congr El Microsc Cancun, 1, 451-452 (1998)
10. Kuhr JC, Fitting HJ: Monte Carlo simulation of electron emission from solids. J Electron Spectrosc Rel Phenom 105, 257-273 (1999)
11. Müllerová I, Frank L: Use of cathode lens in scanning electron microscope for low voltage applications. Mikrochim Acta 114/115, 389-396 (1994)
12. Reimer L: Scanning Electron Microscopy. Springer-Verlag, Berlin (1998) 52-56
13. Schmid R, Gaukler KH, Seiler H: Measurement of elastically reflected electrons (E≤2.5 keV) for imaging of surfaces in a simple ultra high vacuum scanning electron microscope. Scan Electron Microsc 1983/II, 501-509 (1983)
14. Zadražil M, El-Gomati MM, Walker A: Measurements of very low energy secondary and backscattered electron coefficients. J Comp Assist Microsc 9, 123-124 (1997)
15. th Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation Brno, 82 (1998a)
16. th Int Congr El Microsc Cancun, 1, 495-496 (1998b)