On the structure, stress and optical properties of CVD tungsten oxide films

Materials Research Bulletin

Volumn 40, Issue 2, 2005, Pages 333-340

  Dimitrova, Z ^a   Gogova, D ^b  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b CTRL LAB SOLAR ENER NEW ENER S   (Bulgaria)

Author keywords

A. Optical materials; A. Thin films; B. Vapor deposition; C. Infrared spectroscopy; C. X ray diffraction; D. Mechanical properties; D. Microstructure; D. Optical properties

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTROCHROMISM; INFRARED SPECTROSCOPY; MECHANICAL PROPERTIES; MICROSTRUCTURE; OPTICAL MATERIALS; OPTICAL PROPERTIES; REACTION KINETICS; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS;

FILM DENSITY; FILM STRUCTURE; PRECURSORS; TUNGSTEN OXIDE FILMS;

TUNGSTEN COMPOUNDS;

EID: 12344330606     PISSN: 00255408     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.materresbull.2004.10.017     Document Type: Article

References (24)

1. C.G. Granqvist Solar Energy Mater. Solar Cells 60 2000 201
2. C.G. Granqvist Handbook of Inorganic Electrochromic Materials 1995 Elsevier Amsterdam
3. K. Bange Solar Energy Mater. Solar Cells 58 1999 1
4. S-H. Baeck, T.F. Jaramillo, D.H. Jeong, and E.W. McFarland Chem. Commun. 2004 390
5. A. Azens, and C.G. Granqvist Solid State Electrochem. 7 2003 64
6. J. Zhang, C.F. Tracy, D.K. Benson, and S.K. Deb J. Mater. Res. 8 1993 2649
7. C.G. Granqvist Appl. Phys. A 57 1993 3
8. S.S. Olevskii, M.S. Sergeev, A.L. Tolstikhina, A.S. Avilov, S.M. Shkornyakov, and S.A. Semiletov Dokl. Akad. Nauk SSSR 275 1984 1415 (in Russian)
9. T. Maruyama, and S. Arai J. Electrochem. Soc. 141 4 1994 1021
10. D. Gogova, and K.A. Gesheva Electrochem. Soc. Proc. 97-25 1997 1482 (Pennington, NJ)
11. D. Gogova, A. Iossifova, T. Ivanova, Z. Dimitrova, and K. Gesheva J. Cryst. Growth 198-199 1999 1230
12. P.H. Townsend, D.M. Barnett, and T.A. Brunner J. Appl. Phys. 62 11 1987 4438
13. Landolt-Boernstein, Numerical Data and Functional Relationship in Science and Technology 17 h, Berlin/Heidelberg, Springer-Verlag, Berlin/Heidelberg, 1985.
14. C.G. Granqvist Solid State Ion. 70-71 1994 678
15. D. Davazoglou, and A. Donnadieu Thin Solid Films 147 1987 131
16. T.A. Taylor, and H.H. Patterson Appl. Spectrosc. 48 1994 674
17. M. Shiojiri, T. Miyano, and Ch. Kaito Jp. J. Appl. Phys. 18 1979 1937
18. Gmelin Handbuch der Anorganische Chemie, Wolfram, Ergaenzungsband B2 Oxide, Berlin/Heidelberg/New York, 1979.
19. R.W. Hoffman Thin Solid Films 34 1976 185
20. R. Koch J. Phys. Condens. Mater. 6 1994 9519
21. R. Abermann, R. Koch, and R. Kramer Thin Solid Films 58 1979 365
22. N. Djourelov, D. Gogova, and M. Misheva Thin Solid Films 347 1999 302
23. R. Swanepoel J. Phys. E. Sci. Instrum. 16 1983 1214
24. A. Szekeres, and D. Gogova 5th Congress on Modern Optics Proc. SPIE 3573 1998 200