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Volumn 347, Issue 1-2, 1999, Pages 302-306
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Study of thin chemical vapour deposited tungsten oxide films by positron annihilation spectroscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
FLOW OF FLUIDS;
POSITRONS;
SPECTROSCOPY;
STRUCTURE (COMPOSITION);
TEMPERATURE;
TUNGSTEN COMPOUNDS;
DEPOSITION PARAMETERS;
GAS FLOW RATE;
ORTHOPOSITRONIUM;
POSITRON ANNIHILATION SPECTROSCOPY;
TUNGSTEN OXIDE;
VOIDS;
THIN FILMS;
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EID: 0345201758
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(99)00014-0 Document Type: Article |
Times cited : (8)
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References (24)
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