Two-dimensional analysis of an elastic layer coupled to a viscous fluid

Journal of Applied Mechanics, Transactions ASME

Volumn 71, Issue 2, 2004, Pages 162-167

  Seok, Jongwon ^a   Kim, Andrew T ^a   Cale, Timothy S ^a   Tichy, John A ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC LAYERS; SLURRY FLUID FLOW; VISCOUS FLUIDS;

DEFORMATION; FOURIER TRANSFORMS; GREEN'S FUNCTION; INTEGRATED CIRCUIT MANUFACTURE; SILICON WAFERS; VISCOUS FLOW;

ELASTOHYDRODYNAMICS;

EID: 12344320410     PISSN: 00218936     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1653702     Document Type: Article

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