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Volumn 241, Issue 1-2 SPEC. ISS., 2005, Pages 61-67
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Electron energy-loss spectroscopic study of the surface of ceria abrasives
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Author keywords
Ceria; CMP; EELS; Non stoichiometry; Segregation
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Indexed keywords
ABRASION;
CHEMICAL MECHANICAL POLISHING;
CRYSTAL LATTICES;
ELECTRON ENERGY LOSS SPECTROSCOPY;
FIELD EMISSION MICROSCOPES;
FLUORINE;
SEGREGATION (METALLOGRAPHY);
STOICHIOMETRY;
TRANSMISSION ELECTRON MICROSCOPY;
CERIA;
FIELD-EMISSION GUNS;
NANOMETERS;
NON-STOICHIOMETRY;
SUB-LATTICES;
CERIUM COMPOUNDS;
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EID: 12244287660
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2004.09.018 Document Type: Conference Paper |
Times cited : (59)
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References (26)
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