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Volumn 241, Issue 1-2 SPEC. ISS., 2005, Pages 61-67

Electron energy-loss spectroscopic study of the surface of ceria abrasives

Author keywords

Ceria; CMP; EELS; Non stoichiometry; Segregation

Indexed keywords

ABRASION; CHEMICAL MECHANICAL POLISHING; CRYSTAL LATTICES; ELECTRON ENERGY LOSS SPECTROSCOPY; FIELD EMISSION MICROSCOPES; FLUORINE; SEGREGATION (METALLOGRAPHY); STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY;

EID: 12244287660     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.09.018     Document Type: Conference Paper
Times cited : (59)

References (26)
  • 19
    • 12244287884 scopus 로고    scopus 로고
    • S.R. Gilliss, J. Bentley, C.B. Carter, 2004, in preparation
    • S.R. Gilliss, J. Bentley, C.B. Carter, 2004, in preparation.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.