Symposium Proceedings: Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues: Preface

Materials Research Society Symposium - Proceedings

Volumn 613, Issue , 2000, Pages

  Singh, R K ^a   Bajaj, R ^a   Moinpour, M ^a   Meuris, M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DIELECTRIC MATERIALS; MATERIALS SCIENCE; PERMITTIVITY;

LOW DIELECTRIC CONSTANT MATERIALS;

CHEMICAL MECHANICAL POLISHING;

EID: 0034433359     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Editorial

References (0)