In situ synthesis and characterization of pure SiC nanowires on silicon wafer

Applied Surface Science

Volumn 241, Issue 1-2 SPEC. ISS., 2005, Pages 236-240

  Yang, W ^a   Araki, H ^a   Thaveethavorn, S ^a   Suzuki, H ^a   Noda, T ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Chemical vapor growth; In situ graphite coating; SiC nanowires

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; GRAPHITE; NANOSTRUCTURED MATERIALS; SILICON WAFERS; SINGLE CRYSTALS; SYNTHESIS (CHEMICAL);

CHEMICAL VAPOR GROWTH; IN SITU GRAPHITE COATINGS; MASS FABRICATION; SIC NANOWIRES;

SILICON CARBIDE;

EID: 12244274379     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.09.039     Document Type: Conference Paper

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