Structural characteristics of SrTiO3 thin films processed by rapid thermal annealing

Journal of Crystal Growth

Volumn 274, Issue 3-4, 2005, Pages 500-505

  Jiang, S W ^a   Zhang, Q Y ^a   Li, Y R ^a   Zhang, Y ^a   Sun, X F ^a   Jiang, B ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

A1. Crystallization; A1. Rapid thermal annealing; A1. Structural Characteristics; A3. SrTiO3 Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; CRYSTALLIZERS; DEPOSITION; GRAIN GROWTH; GRAIN SIZE AND SHAPE; MORPHOLOGY; PULSED LASER DEPOSITION; RAPID THERMAL ANNEALING; SATURATION (MATERIALS COMPOSITION); STRONTIUM COMPOUNDS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

CRYSTALLINE QUALITY; ROUGHNESS MEAN SQUARE (RMS); SRTIO3 THIN FILMS; STRUCTURAL CHARACTERIASTICS;

THIN FILMS;

EID: 12244272182     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.10.064     Document Type: Article

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