Fabrication of ferroelectric PbZrxTi1-xO3 thick films and their optical waveguide properties

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 2, 2004, Pages 422-424

  Hu, G J ^a   Hu, S H ^a   Meng, X J ^a   Wang, G S ^a   Zhao, Q ^a   Sun, J L ^a   Chu, J H ^a   Dai, N ^a   Xu, L ^b   Liu, L Y ^b   Li, D X ^b  

^a SHANGHAI INSTITUTE OF TECHNICAL PHYSICS   (China)

^b FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CONCENTRATION (PROCESS); EPITAXIAL GROWTH; FERROELECTRIC MATERIALS; GRAIN BOUNDARIES; IMPULSE NOISE; LEAD COMPOUNDS; OPTICAL WAVEGUIDES; SCATTERING; SOL-GELS; SUBSTRATES; SURFACE PHENOMENA; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS;

FERROELECTRIC THICK FILMS; PRISM-FILM COUPLING;

THICK FILMS;

EID: 12144289336     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1648677     Document Type: Article

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