Preparation and study of properties of indium-doped ZnO films on Si substrates

Guangxue Xuebao/Acta Optica Sinica

Volumn 24, Issue 11, 2004, Pages 1459-1462

  Peng, Xingping ^a   Yang, Yinghu ^a   Song, Chang'an ^a   Wang, Yinyue ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

In doped; Photoluminescence; Radio frequency reactive sputtering; Thin film optics; ZnO films

Indexed keywords

ATOMIC FORCE MICROSCOPY; INDIUM; MORPHOLOGY; PHOTOLUMINESCENCE; SEMICONDUCTOR DOPING; SPUTTERING; X RAY DIFFRACTION; ZINC OXIDE;

INDIUM DOPING; RADIO FREQUENCY REACTIVE SPUTTERING; THIN FILM OPTICS; ZINC OXIDE FILMS;

THIN FILMS;

EID: 12144284340     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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