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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3354-3358

Metallization-induced damage in III-V semiconductors

(4) Chen, Ching Hui a Hu, Evelyn L a Schoenfeld, Winston V a Petroff, Pierre M a

a University of California (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744386913 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.590381 Document Type: Article

Times cited : (15)

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