Radiation enhanced diffusion of low energy ion-induced damage

Applied Physics Letters

Volumn 69, Issue 1, 1996, Pages 58-60

  Chen, Ching Hui ^a   Green, Debora L ^a,b   Hu, Evelyn L ^a   Ibbetson, James P ^a   Petroff, Pierre M ^a  

^a University of California   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001802967     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118118     Document Type: Article

References (13)

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