Evaluation of optical properties of the amorphous carbon film on fused silica

Materials Science and Engineering: B

Volumn 107, Issue 1, 2004, Pages 70-77

  Baydoǧan, Nilgün Doǧan ^a  

^a ISTANBUL TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Carbon; Film deposition; Optical properties; Plasma processing; Thin films

Indexed keywords

AMORPHOUS FILMS; CATHODES; CHEMICAL BONDS; CONDENSATION; DENSITY (OPTICAL); DEPOSITION; ENERGY GAP; FUSED SILICA; IONIZATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

FILM DEPOSITION; PLASMA PROCESSING;

DIAMOND LIKE CARBON FILMS;

EID: 1142288172     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2003.10.013     Document Type: Article

References (20)

1. Anders A., Fong W., Kulkarni A.V., Ryan F.W., Bhatia C.S. Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs. IEEE Trans. Plasma Sci. 29:2001;768-775.
2. J.F. Shackelford, Bioceramics, Applications of Ceramic and Glass Materials in Medicine. Trans. Tech. Publications, Uetikon-Zuerich, Switzerland, 1999.
3. P.J. Gielisse, V.I.I. Omskii, G. Popovici, M. Prelas, Diamond and diamond-like carbon film applications, nucleation and growth modeling and phase equilibria properties and characterization diamond-like carbon wide bandgap nitrides and carbides. In: Proceedings Third International Symposium on Diamond Films, Technomic Publishing Co. Inc., St. Petersburg, Russia, 1998.
4. Grill A. Electrical and optical properties of diamond-like carbon. Thin Solid Films. 355-356:1999a;189-193.
5. A. Richardt, A.M. Durand, LE VIDE Les couches minces Les couches dures, Editions IN FINE, Paris, France, 1994.
6. Barklie R.C. Characterisation of defects in amorphous carbon by electron paramagnetic resonance. Diamond Relat. Mater. 10:2001;174-181.
7. R.H. Doremus, Glass Science, second ed. Wiley/Interscience, New York, USA, 1994.
8. K. Nassau, The Physics and Chemistry of Colour, The Fifteen Causes of Colour. Wiley, New York, 1983.
9. C.R. Bamford, Colour Generation and Control in Glass, Glass Science and Technology, vol. 2, Elsevier, Amsterdam, The Netherlands, 1977.
10. Grill A. Plasma deposited diamond like carbon and related materials. IBM J. Res. Dev. 43:1999b;147-163.
11. CEN - Comitee Europeen De Normalisation - European Committee for Standardisation, 1992. Glass in Building-Determination of Light Transmittance-Solar Direct Transmittance-Total Solar Energy Transmittance and Ultraviolet Transmittance, and Related Glazing Characteristics, CEN/TC129IWG9/N.4E Rew.7 July 1992.
12. F. Tooley, Handbook of Glass Manufacture, A Book Reference for the Plant Executive, Technologist and Engineer, vol. 1. Ogden Publishing Company, Publishers of the Glass Industry and The Glass Packer, New York, 1960a.
13. F. Tooley, Handbook of Glass Manufacture, A Book Reference for the Plant Executive, Technologist and Engineer, vol. 2. Ogden Publishing Company, Publishers of the Glass Industry and the Glass Packer, New York, 1960b.
14. B. Fortner, T. Meyer, Number By Colours, Springer and Telos. The Electronic Library of Science. New York, USA, 1997.
15. W.R. McCluney, Introduction to Radiometry and Photometry, Artech House Inc., Boston, USA, 1994.
16. A.C. Hardy, Handbook of Colourimetry. The MIT Press, Massachusetts, USA, 1966.
17. N.F. Mott, E.A. Davis, Electronic Processes in Non-Crystalline Materials, second ed. Clarendon Press, Oxford, 1979.
18. R.A. Smith, In: Arrowsmith, J.W. (Ed.), Semiconductors, second ed. Cambridge University Press, Bristol, 1978.
19. Bessais B., Ezzaouia H., Bennaceur R. Electrical behavior and optical properties of screen-printed ITO thin films. Semicond. Sci. Technol. 8:1993;1671-1678.
20. Chang J.F., Hon M.H. The effect of deposition temperature on the properties of Al-doped zinc oxide thin films. Thin Solid Films. 386:2001;79-86.