Piezoelectric coefficients of PZT thin films

Integrated Ferroelectrics

Volumn 50, Issue , 2002, Pages 143-148

  Tsang, R C W ^a   Kwok, K W ^a   Chan, H L W ^a   Choy, C L ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Longitudinal piezoelectric coefficient d33; PZT films; Sol gel; Transverse piezoelectric coefficient 631

Indexed keywords

AMPLIFIERS (ELECTRONIC); INTERFEROMETERS; LASER BEAMS; LEAD COMPOUNDS; PIEZOELECTRICITY; SOL-GELS; THERMAL EFFECTS;

LEAD ZIRCONATE TITANATE (PZT); SURFACE DISPLACEMENT; TRANSVERSE PIEZOELECTRIC COEFFICIENTS;

THIN FILMS;

EID: 1142279816     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580215506     Document Type: Article

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