Monolithically integrated refractive microlens array to improve imaging quality of an infrared focal plane array

Optical Engineering

Volumn 43, Issue 11, 2004, Pages 2589-2594

  He, Miao ^a,b   Yuan, Xiaocong ^a   Moh, Ken Jin ^a   Bu, Jing ^a   Yi, Xinjian ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Infrared focal plane array; Microlens array; Reactive ion etching; Reflow

Indexed keywords

COMPUTER SIMULATION; GEOMETRICAL OPTICS; IMAGE QUALITY; INFRARED IMAGING; OPTICAL DESIGN; RAY TRACING; REACTIVE ION ETCHING; REFRACTIVE INDEX;

INFARED FOCAL PLANE ARRAY; MICROLENS ARRAY; OPTICAL CONCENTRATORS; REFLOW;

MICROLENSES;

EID: 11244352184     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1801431     Document Type: Article

References (7)

1. M. Z. Tidrow and W. R. Dyer, "Infrared sensors for ballistic missile defense," Infrared Phys. Technol. 42(3-5), 333-336 (2001).
2. A. Rogalski, "Infrared detectors: an overview," Infrared Phys. Technol. 43(3-5), 187-210 (2002).
3. N. T. Gordon, C. L. Jones, and D. J. Purdy, "Application of microlenses to infrared detector arrays," Infrared Phys. 31(6), 599-604 (1991).
4. B.-Y. Tsaur, C. K. Chen, and S. A. Marino, "Heterojunction GeSi/Si infrared dectors and focal plane arrays," Opt. Eng. 33(1), 72-78 (1994).
5. M. He, X. J. Yi, Z. H. Cheng, L. Q. Liu, and Y. R. Wang, " Fabrication of GaAs microlenses array with long focal length for improving responsivity of PtSi IRFPA device," Chin. J. Infrared Millimeter Waves 20(5), 321-324 (2001).
6. M. He, X. J. Yi, and Z. H. Cheng, "Research on fabrication and optical performance testing of silicon microlenses array with large F /number," Chin. J. Lasers A27(12), 1097-1102 (2000).
7. S. Haselbeck, H. Schrelber, and J. Schwider, "Microlenses fabricated by melting a photoresist on a baselayer," Opt. Eng. 32(6), 1322-1327 (1993).