Anti reflection films fabricated by roll-to-roll layer-by-layer adsorption process

IEICE Transactions on Electronics

Volumn E87-C, Issue 12, 2004, Pages 2064-2070

  Fujita, Shiro ^a   Fujimoto, Koji ^a   Naka, Takayuki ^a   Shiratori, Seimei ^a,b  

^a KEIO UNIVERSITY   (Japan)

^b SNT Co Ltd   (Japan)

Author keywords

Anti reflection; Layer by layer; Polyelectrolyte; Roll to roll

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; OPTICAL DEVICES; OPTOELECTRONIC DEVICES; PH EFFECTS; POLYELECTROLYTES; REFLECTION; REFRACTIVE INDEX;

ANTI REFLECTION; LAYER-BY-LAYERS; MASS PRODUCTION; ROLL-TO-ROLL;

LIGHT ABSORPTION;

EID: 11144300817     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (17)

1. M. Izu and S.R. Ovshinsky, "Roll-to-roll plasma deposition machine for the production of tandem amorphous silicon alloy solar cells," Thin Solid Films, vol.119, no.1, pp.55-58, 1984.
2. A. Takano, T. Wada, T. Yoshida, Y. Ichikawa, and K. Harashima, "Excitation frequency effects on large-area hydrogenated amorphous silicon film deposition process using flexible film substrate," Jpn. J. Appl. Phys., vol.41, pp.323-325, 2002.
3. A. Takano, M. Tanda, M. Shimosawa, T. Wada, and T. Kamoshita, "Excitation frequency effects on stabilized efficiency of large-area amorphous silicon solar cells using flexible plastic film substrate," Jpn. J. Appl. Phys., vol.42, pp.1312-1314, 2003.
4. A. Takano, M. Masayoshi, M. Tanda, S. Iwasaki, H. Tanaka, J. Yasuda, and T. Kamoshita, "Highly texturized silver electrode deposition using roll-to-roll low-temperature sputtering process," Jpn. J. Appl. Phys., vol.43, pp.277-279, 2004.
5. A. Shah, P. Torres, R. Tscharner, N. Wyrsch, and H. Keppner, "Photovoltaic technology the case for thin-film solar cells," Science, vol.285, pp.692-698, 1999.
6. 3 film on roll-to-roll flexible plastic substrate prepared by DC magnetron sputtering," Jpn. J. Appl. Phys., vol.42, pp.217-222, 2003.
7. K. Noda, M. Yamagami, M. Yamamoto, H. Sato, H. Itaya, A. Okajima, and M. Yamada, "Thin film formation by direct reverse roll-coating on plastic web," Jpn. J. Appl. Phys., vol.42, pp.5722-5725, 2003.
8. G. Decher and J. Schmitt, "Buildup of ultrathin multilayer films by a self-assembly process: III. Consecutively alternating adsorption of anionic and cationic polyelectrolytes on charged surfaces," Thin Solid Films, vol.210/211, pp.831-835, 1992.
9. D. Yoo, S. Shiratori, and M.F. Rubner, "Controlling bilayer composition and surface wettability of sequentially adsorbed multilayers of weak polyelectrolytes," Macromolecules, vol.31, pp.4309-4318, 1998.
10. G. Decher, "Fuzzy nanoassemblies: Toward layered polymeric multicomposites," Science, vol.277, pp.1232-1237, 1997.
11. S. Shiratori and M.F. Rubner, "pH-dependent thickness behavior of sequentially adsorbed layers of weak polyelectrolytes," Macromolecules, vol.33, pp.4213-4219, 2000.
12. J.D. Mendelsohn, C.J. Barrett, V.V. Chan, A.J. Pal, A.M. Mayes, and M.F. Rubner, "Fabrication of microporous thin films from polyelectrolyte multilayers," Langmuir, vol.16, pp.5017-5023, 2000.
13. J.A. Hiller, J.D. Mendelsohn, and M.F. Rubner, "Reversibly erasable nanoporpus anti-reflection coatings from polyelectrolyte multilayers," Nature Mater., vol.1, pp.59-63, 2002.
14. S. Fujita, T. Mima, J.-H. Kim, and S. Shiratori, "Optical properties of polyelectrolyte multilayers fabricated by layer-by-layer adsorption processes," MRS-J Proc., vol.28, no.1, pp.3-6, 2003.
15. S. Fujita and S. Shiratori, "Waterproof anti reflection films fabricated by layer-by-layer adsorption process," Jpn. J. Appl. Phys., vol.43, no.4B, pp.2346-2351, 2004.
16. S. Shiratori, Japan PAT. no.3262323.
17. J. Sun, M. Gao, M. Zhu, J. Feldman, and H. Mohwald, "Layer-by-layer depositions of polyelectrolyte/CdTe nanocrystal films controlled by electric fields," J. Mater. Chem., vol.12, pp.1775-1778, 2002.