LOCALIZED DEPOSITION OF POLYSILICON FOR MEMS POST-FABRICATION PROCESSING

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1999-W, Issue , 1999, Pages 37-42

  Joachim, Daphne ^a   Lin, Liwei ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; DECOMPOSITION; DEPOSITION RATES; FABRICATION; FINITE ELEMENT METHOD; HEAT TRANSFER; POLYCRYSTALLINE MATERIALS; POLYSILICON;

FABRICATION PROCESS; FINITE ELEMENT ANALYSE; LOCALISED; MICRO BEAMS; PEAK TEMPERATURES; POLYCRYSTALLINE; POLYSILICON DEPOSITION; POST-FABRICATION; PROCESS CONDITION; SILANE GAS;

THERMOANALYSIS;

EID: 0002741805     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0243     Document Type: Conference Paper

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