1.55-μm Si-based MOEMS optical tunable filter

Chinese Optics Letters

Volumn 1, Issue 9, 2003, Pages 529-531

  Zuo, Yuhua ^a   Huang, Changjun ^a   Cheng, Buwen ^a   Cai, Xiao ^a   Mao, Rongwei ^a   Li, Chuanbo ^a   Luo, Liping ^a   Gao, Junhua ^a   Bai, Yunxia ^a   Jiang, Lei ^a   Ma, Chaohua ^a   Zhu, Jialian ^a   Wang, Liangchen ^a   Yu, Jinzhong ^a   Wang, Qiming ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; DENSE WAVELENGTH DIVISION MULTIPLEXING; MICROMACHINING;

SILICON BASED MICROOPTIELECTRO-MECHANICAL SYSTEMS; SURFACE MICROMACHINING; TUNABLE ACTIVE DEVICES;

OPTICAL FILTERS;

EID: 10744230242     PISSN: 16717694     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

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