Influence of the SRO as Passivation Layer on the Microwave Attenuation Losses of the CPWs Fabricated on HR-Si

IEEE Microwave and Wireless Components Letters

Volumn 13, Issue 12, 2003, Pages 508-510

  Reynoso Hernandez J A ^a   Rangel Rojo, Raúl ^a   Aceves, M ^b   Zaldivar, I ^b   Sanchez L E ^b   Herrera, M ^b  

^a Div de Fisica Aplicada   (Mexico)

^b INSTITUTO NACIONAL DE ASTROFÍSICA   (Mexico)

Author keywords

Attenuation loss; Coplanar wave guides (CPW); Matrix wave propagation; Passivation layer transmission; Silicon rich oxide (SRO)

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTROMAGNETIC WAVE ATTENUATION; ELECTROMAGNETIC WAVE PROPAGATION; ELECTROMAGNETIC WAVE REFLECTION; MATRIX ALGEBRA; MICROWAVES; PASSIVATION; PERMITTIVITY; SILICON COMPOUNDS; THERMOOXIDATION;

ATTENUATION LOSS; MATRIX WAVE PROPAGATION; PASSIVATION LAYER TRANSMISSION; SILICON RICH OXIDE (SRO);

WAVEGUIDES;

EID: 10744220669     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2003.819967     Document Type: Article

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