Improvement in homogeneity and ferroelectric property of mist deposition derived Pb(Zr,Ti)O3 thin films by substrate surface treatment

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 9 B, 2004, Pages 6562-6566

  Kawasaki, Susumu ^a   Motoyama, Shin Ichi ^b   Tatsuta, Toshiaki ^b   Tsuji, Osamu ^b   Okamura, Soichiro ^a   Shiosaki, Tadashi ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b 33 Tanakamiya cho Takeda F   (Japan)

Author keywords

Ferroelectric property; Homogeneity; Mist deposition; Pt surface; PZT; Surface treatment; Thin film; UV

Indexed keywords

CONTACT ANGLE; FERROELECTRICITY; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSCOPIC EXAMINATION; PLATINUM; SUBSTRATES; SURFACE ROUGHNESS; SURFACE TREATMENT;

FERROELECTRIC PROPERTY; HOMOGENEITY; MIST DEPOSITION; WETTABILITY;

THIN FILMS;

EID: 10444281553     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.6562     Document Type: Conference Paper

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