Conformal LSMCD deposition of SrBi2(Ta1-xNbx)2O9

Integrated Ferroelectrics

Volumn 14, Issue 1-4, 1997, Pages 237-246

  Solayappan, Narayan ^a   Derbenwick, Gary F ^a   Mcmillan, Larry D ^a   Paz De Araujo, Carlos A ^a   Hayashi, Shinichiro ^b  

^a Symetrix Corporation   (United States)

^b PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; FERROELECTRIC MATERIALS; LEAKAGE CURRENTS; STRONTIUM COMPOUNDS; THIN FILMS;

LIQUID SOURCE MISTED CHEMICAL DEPOSITION (LSMCD);

DIELECTRIC FILMS;

EID: 0031381820     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708019997     Document Type: Article

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