Polarization difference probing: A new phase detection scheme for laser voltage probing

Proceedings of the 30th International Symposium for Testing and Failure Analysis, ISTFA 2004

Volumn , Issue , 2004, Pages 9-17

  Lo, William ^a   Nataraj, Nagamani ^a   Boiadjieva, Nina ^a   Vedegarbha, Praveen ^a   Wilsher, Kenneth ^a  

^a Credence Systems Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; FIELD EFFECT TRANSISTORS; INTERFEROMETERS; LASER MODE LOCKING; LASERS; LIGHT POLARIZATION; OPTICAL BEAM SPLITTERS; PHASE MODULATION; PROBES; SEMICONDUCTOR LASERS; SIGNAL TO NOISE RATIO; WAVEFORM ANALYSIS;

LASER VOLTAGE PROBES (LVP); OPTO-ELECTRONIC EFFECTS; PHASE SENSITIVITY; TIME-RESOLVED EMISSION (TRE);

CMOS INTEGRATED CIRCUITS;

EID: 10444259071     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Wilsher, K., et al. Integrated Circuit Waveform Probing Using Optical Phase Shift Detection, in International Symposium for Testing and Failure Analysis (ISTFA), 2000, p 479-85.
2. Wilsher, K.R. and W.K. Lo. Practical Optical Waveform Probing of Flip-Chip CMOS Devices, in International Test Conference (ITC), 1999, p 932.
3. Soref, R.A. and B.R. Bennett, Electrooptical Effects in Silicon. IEEE Journal of Quantum Electronics, 1987. QE-23(1): p. 123-9.
4. Kasapi, S., et al., Laser Beam Backside Probing of CMOS Integrated Circuits. Microelectronics Reliability, 1999. 39: p. 957.
5. Lo, W., et al. Next-Generation Optical Probing Tools for Design Debug of High Speed Integrated Circuits, in International Symposium for Testing and Failure Analysis (ISTFA), 2002, p 753-62.
6. Eiles, T. and P. Pardy. Liquid Immersion Objective for High-Resolution Optical Probing of Advanced Microprocessors, in International Symposium for Testing and Failure Analysis (ISTFA), 2001, p 167-70.
7. Boggess, T.F., et al., Nonlinear Refraction in Silicon Induced by One-Micron Picosecond Pulses. Optical Communications, 1987. 64(4): p. 387.