Formation of a surface SiC layer by carbon-ion implantation into silicon

Thin Solid Films

Volumn 449, Issue 1-2, 2004, Pages 73-79

  Brink, D J ^a,b   Camassel, J ^b   Malherbe, J B ^a  

^a UNIVERSITY OF PRETORIA   (South Africa)

^b UNIV MONTPELLIER   (France)

Author keywords

Ellipsometry; Infra red reflectance; Ion implantation; Silicon carbide

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; HIGH TEMPERATURE EFFECTS; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; LIGHT REFLECTION; RAMAN SPECTROSCOPY; SPUTTERING; SUBSTRATES; SURFACE PHENOMENA; SYNTHESIS (CHEMICAL);

INFRE-RED REFLECTANCE; ION IMPLANTERS;

SILICON CARBIDE;

EID: 1042292767     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.10.018     Document Type: Article

References (17)

1. Moroc H., Strite S., Gao G.B., Lin M.E., Sverlov B., Burns M. J. Appl. Phys. 76:1994;1363.
2. Dreike P.L., Fleetwood D.M., King D.B., Sprauer D.C., Zipperian T.E. IEEE Trans. Comp. Pack. Manuf. Technol. 17:1994;594.
3. Müller G., Krötz G., Niemann E. Sensors Actuators A. 43:1994;259.
4. Reeson K.J., Hemment P.L.F., Stoemenos J., Celler G.E. Appl. Phys. Lett. 51:1987;2242.
5. Nejim A., Hemment P.L.F., Stoemenos J. Appl. Phys. Lett. 66:1995;2646.
6. Lindner J.K.N., Volz K., Stritzker B. Inst. Phys. Conf. Ser. 142:1996;145.
7. Ziegler J.F., Biersack J.P., Littmark U. Ziegler J.F. The Stopping and Range of Ions in Solids, vol. 1. 1985;Pergamon Press, New York.
8. Serre C., Calvo-Barrio L., Pérez-Rodríguez A., Romano-Rodríguez A., Morante J.R., Pacaud Y., Kögler R., Heera V., Skorupa. J. Appl. Phys. 79:1996;6907.
9. Bellina J.J., Zeller M.V. Appl. Surf. Sci. 25:1986;380.
10. Malherbe J.B. Radiat. Effects. 70:1983;261.
11. MacMillan M.F., Devaty R.P., Choyke W.J., Goldstein D.R., Spanier J.E., Kurtz A.D. J. Appl. Phys. 80:1996;2412.
12. MacMillan M.F., Devaty R.P., Mantese J.V. Phys. Rev. B. 43:1991;13838.
13. Roussel P.J., Vanhellemont J., Maes H.E. Thin Solid Films. 234:1993;423.
14. Bruggeman D.A.G. Ann. Phys. 5:1935;637.
15. Garnet J.C.M. Philos. Trans. R. Soc. Lond. A. 203:1904;385.
16. Jellison G.E. Jr. Thin Solid Films. 234:1993;416.
17. Guenter R. Modern Optics. 1990;124 Wiley, New York.