Evaluation of depth of field in SEM images in terms of the information-passing capacity (IPC) and contrast gradient in SEM image

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 519, Issue 1-2, 2004, Pages 280-285

  Sato, Mitsugu ^a   Ishitani, Tohru ^a   Watanabe, Shunya ^b   Nakagawa, Mine ^b  

^a HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Depth of field; Image resolution; Information passing capacity; IPC; SEM

Indexed keywords

ABERRATIONS; CONTRAST MEDIA; FOCUSING; GRADIENT INDEX OPTICS; GRADIENT METHODS; IMAGE RECONSTRUCTION; NUCLEAR INSTRUMENTATION; OPTICAL RESOLVING POWER; OPTICAL TRANSFER FUNCTION; PROBABILITY DISTRIBUTIONS; SCANNING ELECTRON MICROSCOPY; SIGNAL TO NOISE RATIO; SPATIAL VARIABLES MEASUREMENT;

CONTRAST GRADIENTS; DEPTH OF FIELD; DIGITAL IMAGING; GAUSSIAN DISTRIBUTION; IMAGE SHARPNESS; INFORMATION-PASSING CAPACITY (IPC); MAGNIFICATION FACTORS;

IMAGE ANALYSIS;

EID: 1042292722     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2003.11.164     Document Type: Conference Paper

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