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Volumn 173, Issue 1-4 SPEC. ISS., 2004, Pages 119-124
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Electrostatic spray assisted vapour deposition of TiO2-based films
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Author keywords
Doping; Electrostatic spray assisted vapour deposition; Gas sensing; TiO2 films
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Indexed keywords
CHEMICAL SENSORS;
ELECTROSTATICS;
ENERGY DISPERSIVE SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
STOICHIOMETRY;
THERMAL EXPANSION;
THICK FILMS;
VAPOR DEPOSITION;
X RAY ANALYSIS;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
DOPING;
ELECTROSTATIC SPRAY ASSISTED VAPOR DEPOSITION;
GAS SENSING;
METAL IONS;
TITANIUM OXIDES;
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EID: 10044297082
PISSN: 01672738
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ssi.2004.07.062 Document Type: Conference Paper |
Times cited : (23)
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References (18)
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