Comparisons between NO2- and O3-sensing properties of phthalocyanines and n-InP thin films in controlled and noncontrolled atmospheres

IEEE Sensors Journal

Volumn 4, Issue 6, 2004, Pages 735-742

  Brunet, Jérôme ^a   Germain, Jean Paul ^a   Pauly, Alain ^a   Blanc, Jean Pierre ^a  

^a LASMEA   (France)

Author keywords

Epitaxial layer; Pollution measurement; Thin film

Indexed keywords

AIR POLLUTION; ELECTRODES; GREENHOUSE EFFECT; NITROGEN OXIDES; OXIDATION; OZONE; SEMICONDUCTING INDIUM PHOSPHIDE; THIN FILMS;

EPITAXIAL LAYERS; POLLUTION MEASUREMENT; SENSING LAYERS;

CHEMICAL SENSORS;

EID: 10044272937     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2004.833499     Document Type: Article

References (21)

1. 2 in air at the sub ppm level," Sens. Actuators B, vol. 18-19, pp. 93-98, 1994.
2. x gas sensor operating at room temperature," Sens. Actuators B, vol. 65, pp. 122-124, 2000.
3. T. Becker et al., "Ozone detection using lox-power-consumption metal-oxide gas sensors," Sens. Actuators A, vol. 74, pp. 229-232, 1999.
4. 2 thin sensing films deposited by the pulse laser ablation." Sens. Actuators B, vol. 60, pp. 90-96, 1999.
5. 3-based semiconductor thick films," Sens. Actuators B, vol. 66, pp. 59-62, 2000.
6. 3 thin films activated by noble metal (Pd, Pt, Au) layers," Sens. Actuators B, vol. 50, pp. 52-59, 1998.
7. J. E. Darby, R. J. McIlroy, G. Revell, S. C. Thorpe, and A. Wilson, "Effect of electron-acceptor gases on lead oxide and lead phthalocyanine thin films: A comparative study," Sens. Actuators B, vol. 3, pp. 157-160, 1991.
8. 3 monitoring as an air pollutant using lead phthalocyanine thin film sensors," Sens. Actuators B, vol. 7, pp. 522-525, 1992.
9. 2 sensors based on lead phthalocyanine thin films," Sens. Actuators B, vol. 4, pp. 511-513, 1991.
10. 2 detection at room temperature with copper phthalocyanine thin film devices," Sens. Actuators B, vol. 67, pp. 307-311, 2000.
11. 2 with copper phthalocyanine thin films II: Application to gas sensing," Thin Solid Films, vol. 219, pp. 251-256, 1992.
12. M. Bouvet et al., "Detection and titration of ozone using metallophthalocyanine based field effect transistors," Sens. Actuators B, vol. 72, pp. 86-93, 2001.
13. M. L. Rodriguez-Méndez, J. Souto, R. de Saja, J. Martinez, and J. A. de Saja, "Lutetium bisphthalocyanine thin films as sensors for volatile organic components (VOCs) of aroma," Sens. Actuators B, vol. 58, pp. 544-551, 1999.
14. 2 sensor based on InP epitaxial thin layers," Thin Solid Films, vol. 348, pp. 266-272, 1999.
15. M. Passard, J. P. Blanc, and C. Maleysson, "Gaseous oxidation and compensating reduction of lutetium bisphthalocyanine and lutetium phthalonaphthalocyanine films," Thin Solid Films, vol. 271, pp. 8-14, 1995.
16. B. Schöllhorn, J. P. Germain, A. Pauly, C. Maleysson, and J. P. Blanc, "Influence of peripheral electron-withdrawing substituents on the conductivity of zinc phthalocyanine in the presence of gases. Part 1: Reducing gases," Thin Solid Films, vol. 326, pp. 245-250, 1998.
17. M. Passard et al., "Doping mechanisms of phthalocyanines by oxidizing gases: Application to gas sensors," Thin Solid Films, vol. 237, pp. 272-276, 1994.
18. A. Schütze, N. Pieper, and J. Zacheja, "Quantitative ozone measurement using a phthalocyanine thin-film sensor and dynamic signal evaluation," Sens. Actuators B, vol. 23, pp. 215-217, 1995.
19. 2 detection by a resistive device based on n-InP epitaxial layers," Sens. Actuators B, vol. 59, pp. 89-93, 1999.
20. C. Maleysson et al., "Elaboration and tests of microelectronically designed gas sensors with phthalocyanine sensitive layers," Sens. Actuators B, vol. 26-27, pp. 144-149, 1995.
21. L. Talazac et al., "Air quality evaluation by monolithic InP-based resistive sensors," Sens. Actuators B, vol. 76, pp. 158-164, 2001.