Fast scanning confocal sensor provides high fidelity surface profiles on a microscopic scale

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5457, Issue , 2004, Pages 115-125

  Schick, Anton ^a   Breitmeier, Ulrich ^b  

^a SIEMENS AG   (Germany)

^b Breitmeier Messtechnik GmbH   (Germany)

Author keywords

Confocal Microscopy; Confocal Optical Scanning; Displacement sensor; Height profiling; Thickness measurement

Indexed keywords

IMAGING TECHNIQUES; LASER BEAM WELDING; MIRRORS; NATURAL FREQUENCIES; OPTICAL MICROSCOPY; OSCILLATORS (MECHANICAL); SCANNING; THICKNESS MEASUREMENT;

CONFOCAL MICROSCOPY; CONFOCAL OPTICAL SCANNING; DISPLACEMENT SENSORS; HEIGHT PROFILING;

OPTICAL SENSORS;

EID: 10044261968     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.544689     Document Type: Conference Paper

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