The rapid confocal sensor, a non contact profilometer for fast 3D sub micron inspection and metrology of large formats

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4449, Issue , 2001, Pages 169-177

  Vaughnn, David ^a   Watkins, Cory ^a   Anderson, Dick ^a  

^a August Technology Corp   (United States)

Author keywords

Confocal; Metrology; Non contact; Profilometry; Sub micron inspection; Topography

Indexed keywords

DEFECTS; DIES; IMAGE QUALITY; INSPECTION; PERFORMANCE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR MATERIALS; SENSORS; THREE DIMENSIONAL;

DIE CONTACT BUMPS; MICRON LATERAL RESOLUTION; NON CONTACT PROFILOMETER; RAPID CONFOCAL SENSOR; THREE DIMENSIONAL SUBMICRON INSPECTION;

OPTICAL SYSTEMS;

EID: 0035760667     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.450092     Document Type: Article

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