Efficient plasma source providing pronounced density peaks in the range of very low magnetic fields

Applied Physics Letters

Volumn 85, Issue 18, 2004, Pages 4007-4009

  Sato, G ^a   Oohara, W ^a   Hatakeyama, R ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BESSEL FUNCTIONS; CARRIER CONCENTRATION; DISPERSIONS; ELECTROMAGNETS; ELECTRON CYCLOTRON RESONANCE; HELICAL ANTENNAS; MAGNETIC FIELDS; OPTIMIZATION;

AZIMUTHAL MODE NUMBER; DOUBLE HALF-TURN ANTENNA (DHT); HELICON WAVE; INDUCTIVELY COUPLED DISCHARGE; RADIO-FREQUENCY DISCHARGES;

PLASMA DENSITY;

EID: 10044247401     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1815071     Document Type: Article

References (11)

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