Electrical measurements on capacitor sizes in the submicron regime for the characterization of real memory cell capacitors

Integrated Ferroelectrics

Volumn 37, Issue 1-4, 2001, Pages 163-172

  Schmitz, T ^a   Prume, K ^a   Tiedke, S ^a   Roelofs, A ^b   Schneller, T ^b   Kall, U ^b   Grossmann, M ^b   Waser, R ^b   Ganpule, C ^c   Stanishefsky, A ^c   Ramesh, R ^c  

^a AIXACCT SYSTEMS GMBH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

AFM; Electrical testing; Ferroelectric memories; Nano sized FIB structures

Indexed keywords

CAPACITORS; FERROELECTRIC DEVICES; NONVOLATILE STORAGE; SIZE DETERMINATION; STRONTIUM COMPOUNDS;

ELECTRICAL TESTING; FERROELECTRIC MEMORIES; FERROELECTRIC NONVOLATILE MEMORY DEVICES (FERAM); MEMORY CELL CAPACITORS;

LEAD COMPOUNDS;

EID: 0942303945     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580108015676     Document Type: Conference Paper

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