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Volumn 20, Issue 2, 2002, Pages 121-127
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Production and characterization of dry lubricant coatings for tools on the base of carbon
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Author keywords
DLC; Dry lubricant films; ECR; Machine parts; PECVD; PVD; TiCN; TiN; Tools; Wear protecting film
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Indexed keywords
AMORPHOUS MATERIALS;
CHARACTERIZATION;
COATINGS;
ELECTRON CYCLOTRON RESONANCE;
LUBRICANTS;
MAGNETRON SPUTTERING;
MULTILAYERS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
TITANIUM COMPOUNDS;
DRY LUBRICANT FILMS;
DIAMOND LIKE CARBON FILMS;
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EID: 0036016405
PISSN: 02634368
EISSN: None
Source Type: Journal
DOI: 10.1016/S0263-4368(02)00010-0 Document Type: Conference Paper |
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Times cited : (11)
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References (6)
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