Preparation of ferroelectric Pb(Zr1-xTix) O3/Si films by laser lift-off technique

Journal of the European Ceramic Society

Volumn 24, Issue 6, 2004, Pages 975-978

  Lin, I Nan ^a   Hsieh, Kun Che ^a   Lee, Kun Yu ^a   Tai, Nyan Hua ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Laser lift off; PZT; Thick film

Indexed keywords

ANODIC POLARIZATION; DECOMPOSITION; LASER APPLICATIONS; LEAD COMPOUNDS; SAPPHIRE; THICK FILMS;

BUFFER MATERIALS;

FERROELECTRIC MATERIALS;

CERAMICS; LASER;

EID: 0942289093     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(03)00491-6     Document Type: Article

References (12)

1. Jin F. Auner G.W. Naik R. Schubring N.W. Mantese J.V. Catalan A.B. Micheli A.L. Giant effective pyroelectric coefficients from graded ferroelectric devices Appl. Phys. Lett. 73 19 1998 1998
2. Scott J.F. de Araujo C.A.P. Ferroelectric memorries Science 246 1989 1400
3. Kaajakari V. Rodgers S. Lal A. Ultrasonically driven surface micromachined motor The Thirteenth Annual International Conference on Micro Electro Mechanical Systems MEMS 40 2000 23-27
4. Matsumoto S. Klein A. Maeda R. Development of bi-directional valve-less micro-pump for liquid Twelfth IEEE International Conference on Micro Electric Mechanical Systems, MEMS 99 1999 141
5. Park J.Y. Yee Y.J. Nam H.J. Bu J.U. Micromachined RF MEMS tunable capacitors using piezoelectric actuators Microwave Symposium Digest, IEEE MTT-S International 3 2001 2111
6. Yi G. Sayer M. Sol-gel processing of complex oxide films Ceram. Bull. 70 7 1991 1173-1179
7. Mackenzie J.D. Xu Y. Ferroelectric materials by the Sol-gel method J. Sol-Gel Sci. Tech. 8 1997 673-679
8. 3 films on Si-substrate by pulsed laser deposition J. Appl. Phys. 77 10 1995 5335
9. Galassi C. Roncari E. Capiani C. Pinasco P. PZT-based Suspensions for tape casting J. Eur. Ceram. Soc. 17 1997 367
10. Song J-K. Sum W. Lee H-S. Kang M-S. Chung K-W. Park J-H. Effect of polymer molecular weight variations on PZT slip for tape casting J. Eur. Ceram. Soc. 20 2000 685
11. Wong W.S. Cho Y. Weber E.R. Sands T. Structural and optical quality of GaN/metal/Si heterostructures fabricated by excimer laser lift-off Appl. Phys. Lett. 75 1999 1887
12. 3 thin films on stainless steel by excimer laser liftoff Appl. Phys. Lett. 76 2000 227