Characterization of B-C-N hybrid prepared by ion implantation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 6, 2003, Pages 1843-1848

  Shimoyama, Iwao ^a   Baba, Yuji ^a   Tetsuhiro, Sekiguchi ^a   Nath, Krishana G ^a   Sasaki, Masayoshi ^b   Okuno, Kenji ^b  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ELECTRONIC STRUCTURE; GRAPHITE; INTERFACES (MATERIALS); ION IMPLANTATION; X RAY PHOTOELECTRON SPECTROSCOPY;

BORAZINE; BORON NITRIDE;

CARBON;

EID: 0842344404     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1611887     Document Type: Article

References (26)

1. M. Kawaguchi, Adv. Mater. (Weinheim, Ger.) 9, 615 (1997).
2. A. Y. Liu, R. M. Wentzcovitch, and M. L. Cohen, Phys. Rev. B 39, 1760 (1989).
3. J. Kouvetakis, T. Sasaki, C. Shen, R. Hagiwara, M. Lerner, K. M. Krishnan, and N. Bartlett, Synth. Met. 34, 1 (1989).
4. T. Sasaki and N. Bartlett, Proceedings of the 197th ACS National Mtg. (Inorg.), Dallas, TX (ACS, Washington, DC, 1989), p. 46.
5. M. Kawaguchi, T. Kawashima, and T. Nakajima, Chem. Mater. 8, 1197 (1996).
6. R. Riedel, J. Bill, and G. Passing, Adv. Mater. (Weinheim, Ger.) 3, 551 (1991).
7. M. Kawaguchi and Y. Wakukawa, Carbon 37, 147 (1999).
8. J. Yu and E. G. Wang, Appl. Phys. Lett. 74, 2948 (1999).
9. R. B. Kaner, J. Kouvetakis, C. E. Warble, M. L. Sattler, and N. Bartlett, Mater. Res. Bull. 22, 399 (1987).
10. A. Perrone, A. P. Caricato, A. Luches, M. Dinescu, C. Ghica, V. Sandu, and A. Andrei, Appl. Surf. Sci. 133, 239 (1998).
11. N. Laidani, M. Anderle, R. Canteri, V. Micheli, G. Speranza, A. Luches, and M. Martino, Appl. Surf. Sci. 157, 135 (2000).
12. Z. Zhou, I. Bello, M. K. Lei, K. Y. Li, C. S. Lee, and S. T. Lee, Surf. Coat. Technol. 128-129, 334 (2000).
13. G. S. Was, and B. M. Dekoven, Nucl. Instrum. Methods Phys. Res. B 59/60, 802 (1991).
14. I. Shimoyama, T. Sekiguchi, and Y. Baba, Jpn. J. Appl. Phys., Part 1 39, 4541 (2000).
15. I. Shimoyama, G. Wu, T. Sekiguchi, and Y. Baba, Phys. Rev. B 62, R6053 (2000).
16. I. Shimoyama, G. Wu, T. Sekiguchi, and Y. Baba, J. Electron Spectrosc. Relat. Phenom. 114-116, 841 (2001).
17. M. C. Santos and F. Alvarez, Phys. Rev. B 58, 13918 (1998).
18. F. W. McLafferty and D. B. Stauffer, The Wiley/NBS Registry of Mass Spectral Data (Wiley Interscience, New York, 1989), Vol. 1, p. 15.
19. S. Shanfield and R. Wolfson, J. Vac. Sci. Technol. A 1, 323 (1983).
20. R. Trehan, Y. Lifshitz, and J. W. Rabalais, J. Vac. Sci. Technol. A 8, 4026 (1990).
21. K. S. Park, D. Y. Lee, K. J. Kim, and D. W. Moon, Appl. Phys. Lett. 70, 315 (1999).
22. Y. Morimoto, Mater thesis, Shizuoka University, Japan, 2000.
23. A. Proctor and P. M. A. Sherwood, Anal. Chem. 54, 13 (1982).
24. Perkin-Elmer Corporation Physical Electronics Division, Handbook of X-Ray Photoelectron Spectroscopy, 1979.
25. S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 21, 165 (1994).
26. W. Halverson and D. T. Quinto, J. Vac. Sci. Technol. A 3, 2141 (1985).