Micromanipulation by Miniature Robots in a SEM Vacuum Chamber

Journal of Robotics and Mechatronics

Volumn 14, Issue 3, 2002, Pages 221-226

  Fuchiwaki, Ohmi ^a   Aoyama, Hisayuki ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

cooperation; micromanipulation; microrobot; real time SEM monitoring; remote operation

Indexed keywords

MICROMANIPULATORS; ROBOTS;

COOPERATION; MICRO MANIPULATION; MICRO ROBOTS; MINIATURE ROBOTS; REAL- TIME; REAL-TIME SEM MONITORING; REMOTE OPERATION; SMALL OBJECTS; SMALL ROBOTS; VACUUM CHAMBERS;

SCANNING ELECTRON MICROSCOPY;

EID: 0742321374     PISSN: 09153942     EISSN: 18838049     Source Type: Journal    
DOI: 10.20965/jrm.2002.p0221     Document Type: Article

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