Automated micromanipulation desktop-station based on mobile piezoelectric microrobots

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2906, Issue , 1996, Pages 66-77

  Fatikow, Sergej ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

Assembly of microsystems; Micromanipulation desktop stations; Microrohots; Piezoelectric microactuators

Indexed keywords

ACTUATORS; CHARGE COUPLED DEVICES; DEGREES OF FREEDOM (MECHANICS); IMAGE PROCESSING; MICROACTUATORS; MICROMANIPULATORS; MICROSCOPES; MICROSYSTEMS; OBJECT RECOGNITION; OPTICAL DATA PROCESSING; PIEZOELECTRICITY; SENSORS;

ACTION PLANS; ADVANCED CONTROL SYSTEMS; EXECUTION CONTROLS; EXECUTION LEVELS; FEEDBACK POSITION CONTROLS; LASER SENSORS; LIGHT MICROSCOPES; LOCAL SENSORS; MICRO COMPONENTS; MICROMANIPULATION DESKTOP-STATIONS; MICROROBOT; MICROROBOTS; MICROROHOTS; MICROSYSTEM TECHNOLOGIES; NEW CONCEPTS; NONDESTRUCTIVE; OPTICAL-; PARALLEL COMPUTER SYSTEMS; PENTIUM; PIEZOELECTRIC MICROACTUATORS; PRECISE MANIPULATIONS; SENSOR SUB SYSTEMS; SUB SYSTEMS; TASK PLANNING;

CONTROL SYSTEMS;

EID: 57949084811     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.260630     Document Type: Conference Paper

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