ERCN* Merged Nets for Modeling Degraded Behavior and Parallel Processes in Semiconductor Manufacturing Systems

IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans.

Volumn 34, Issue 1, 2004, Pages 102-112

  Jeng, MuDer ^a   Xie, Xiaolan ^b   Chung, Sheng Luen ^c  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^b UNIVERSITÉ DE LORRAINE   (France)

^c NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Local processing cycle; Petri net synthesis; Qualitative analysis; R D fab

Indexed keywords

CYBERNETICS; EFFICIENCY; FAILURE ANALYSIS; PETRI NETS; PHOTOLITHOGRAPHY; PREVENTIVE MAINTENANCE; SEMICONDUCTOR MATERIALS; SILICON WAFERS; STATE SPACE METHODS;

LOCAL PROCESSING CYCLE; PETRI NET SYNTHESIS; QUALITATIVE ANALYSIS; R AND D FAB;

PARALLEL PROCESSING SYSTEMS;

EID: 0742307436     PISSN: 10834427     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSMCA.2003.820579     Document Type: Article

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