Finite element modeling of magnetostriction for multilayered MEMS devices

Journal of Magnetism and Magnetic Materials

Volumn 270, Issue 1-2, 2004, Pages 167-173

  Si, Ho Mun ^a   Cho, Chongdu ^a  

^a Inha University   (South Korea)

Author keywords

Finite element modeling; Magnetostriction; Magnetostrictive film; MEMS

Indexed keywords

ACTUATORS; ASPECT RATIO; BIMETALS; FINITE ELEMENT METHOD; GIANT MAGNETORESISTANCE; MAGNETIC FIELD EFFECTS; MAGNETIC THIN FILMS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MULTILAYERS;

FINITE ELEMENT MODELING; MAGNETOSTRICTIVE FILMS;

MAGNETOSTRICTION;

EID: 0742303079     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmmm.2003.08.014     Document Type: Article

References (21)

1. Honda T., Arai K.I., Yamaguchi M. J. Appl. Phys. 76(10):1994;6994.
2. Quandt E., Gerlach B., Seemann K. J. Appl. Phys. 76(10):1994;7000.
3. E. Quandt, A. Ludwig, K. Seemann, TRANSDUCERS '97 1997 International Conference on Solid-State Sensors and Actuators, Chicago, June 16-19, 1997, pp. 1089-1092.
4. Quandt E., Seemann K. Reichl H., Heuberger A. Micro Systems Technologies 96. 1996;451-456 VDE-Verlag, Berlin.
5. F. Claeyssen, N. Lhermet, J. Betz, K. MacKay, D. Givord, E. Quandt, H. KronMuller, Autuator 98, Sixth International Conference on New Actuators, 17-19 June 1998, Bremen, Germany, pp. 372-375.
6. Garnier A., Bourouina T., Fujita H., Hiramoto T., Orsier E., Peuzin J.-C. Sensors Actuators. 84:2000;156.
7. Bourouina T., Garnier A., Fujita H. Jpn. J. Appl. Phys. 41:2002;1608.
8. Klokholm E. IEEE Trans. Magn. 12:1976;819.
9. du Tremolet de Lacheisserie E., Peuzin J.C. J. Magn. Magn. Mater. 136:1994;189.
10. van de Riet E. J. Appl. Phys. 76:1994;584.
11. Marcus P.M. J. Magn. Magn. Mater. 168:1997;18.
12. Iannotti V., Lanotte L. J. Magn. Magn. Mater. 202:1999;191.
13. Zhang W.X., Peng B., Jiang H.C., Yang S.Q. J. Magn. Magn. Mater. 247:2002;111.
14. Benbouzid M.E.H., Body C., Reyne G., Meunier G. IEEE Trans. Magn. 31:1995;3563.
15. Watts R., Gibbs M.R.J., Karl W.J. Appl. Phys. Lett. 70:1997;2607.
16. Body C., Reyne G., Meunier G. IEEE Trans. Magn. 33:1997;1620.
17. Besbes M., Ren Z., Razek A. IEEE Trans. Magn. 32:1996;1058.
18. K.J. Bathe, Finite element procedures, Prentice-Hall, Inc., Englewood Cliffs, NJ, 1996.
19. Body C., Reyne G., Meunier G., Quandt E., Seemann K. IEEE Trans. Magn. 33:1997;2163.
20. Quandt E., Seemann K. Sensors Actuators A. 50:1995;105.
21. T. Honda, K.I. Arai, M. Yamaguchi, Micro-Electro-Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on 1994. pp. 51-56.