Magnetostrictive microactuators and application to two-dimensional optical scanners

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 3 A, 2002, Pages 1608-1613

  Bourouina, Tarik ^a   Garnier, Amalia ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Magnetostriction; MEMS; Microactuator; Microresonator; Optical scanner

Indexed keywords

ANISOTROPY; FREQUENCIES; MAGNETOSTRICTIVE DEVICES; MICROELECTROMECHANICAL DEVICES; RESONATORS; SCANNING; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; TERBIUM ALLOYS; THIN FILMS;

OPTICAL SCANNERS;

MICROACTUATORS;

EID: 0036508627     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.1608     Document Type: Article

References (10)