Characterization and fabrication of InGaAsP/InP deep-etched micro-waveguides

Microwave and Optical Technology Letters

Volumn 40, Issue 3, 2004, Pages 216-218

  Beaurain, A ^a   Dupont, S ^a   Li, H W ^a   Vilcot, J P ^a   Legrand, C ^a   Harari, J ^a   Constant, M ^a   Decoster, D ^a  

^a INSTITUT D ELECTRONIQUE   (France)

Author keywords

Fabrication; InGaAsP InP; Integrated optics; Loss measurement; Micro waveguide

Indexed keywords

ETCHING; FABRY-PEROT INTERFEROMETERS; INTEGRATED OPTICS; LASER TUNING; LIGHT POLARIZATION; LIGHT TRANSMISSION; MOLECULAR BEAM EPITAXY; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SUBSTRATES; SURFACE PHENOMENA;

LOSS MEASUREMENTS; MICRO-WAVEGUIDES;

OPTICAL WAVEGUIDES;

EID: 0742290220     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/mop.11333     Document Type: Article

References (10)

1. F. Xia, J.K. Thomson, M.R. Gokhale, P.V. Studenkov, J. Wei, W. Lin, and S.R. Forrest, An asymmetric twin-waveguide high-bandwidth photodiode using a lateral taper coupler, IEEE Photon Technol Lett 13 (2001), 845-847.
2. D. Rafisadeh, J.P. Zang, S.C. Hagness, A. Taflove, K.A. Stair, S.T. Ho, and R.C. Tiberio, Waveguide coupled AlGaAs/GaAs microcavity ring and disk resonators with high finesse and 21.6 nm free spectral range, Optics Lett 22 (1997), 1244-1246.
3. J.V. Hryniewicz, P.P. Absile, B.E. Little, R.A. Wilson, and P.T. Ho, High order filter response in coupled microring resonators, IEEE Photon Technol Lett 12 (2000), 320-322.
4. V. Van, P.P. Absil, J.V. Hryniewicz, and P.T. Ho, Propagation loss in single-mode GaAs-AlGaAs microring resonators: measurement and model, J Lightwave Technol 19 (2001), 1734-1739.
5. D. Rafizadeh, J.P. Zang, R.C. Tiberio, and S.T. Ho, Propagation loss measurements in semiconductor microcavity ring and disk resonators, J Lightwave Technol 16 (1998), 1308-1313.
6. K. Djordjev, S.J. Choi, S.J. Choi, and P.D. Dapkus. Microdisk tunable resonant filters and switches, IEEE Photon Technol Lett 14 (2002), 828-830.
7. R. Kaiser and H. Heinrich, Optoelectronic/Photonic Integrated Circuits on InP between technological feasibility and commercial success, IEICE Trans Electron E 85-C (2002).
8. I. Cayrefourcq, M. Schaller, J.P. Vilcot, J. Harari, J.P. Gouy, and D. Decoster, Low-power consumption 1*4 cascade switch for microwave applications. Microwave Op Technol Lett 18 (1998), 243-246.
9. K. Blary, S. Dupont, J.P. Vilcot, J. Chazelas, and D. Decoster, DOS optical switch for microwave optical links based applications. Electron Lett 38 (2002), 1697-1699.
10. R.J. Deri and E. Kapon, Low loss III-V semiconductor optical waveguides, IEEE J Quantum Electron 27 (1991), 626-640.