Basic properties of AlN layers deposited onto SiC

Journal of Wide Bandgap Materials

Volumn 9, Issue 4, 2002, Pages 335-341

  Klimczak, Krzysztof ^a   Szmidt, Jan ^a   Olszyna, Andrzej ^a   Bakowski, Mietek ^b   Barcz, Adam ^c  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b ACREO AB   (Sweden)

^c INSTITUTE OF PHYSICS   (Poland)

Author keywords

Aluminium nitride; Electrical properties; Silicon carbide

Indexed keywords

EID: 0347779893     PISSN: 1524511X     EISSN: None     Source Type: Journal    
DOI: 10.1106/152451102024440     Document Type: Article

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