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Volumn 6, Issue 5 II, 1999, Pages 1655-1666
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Geometrical aspects of a hollow-cathode planar magnetron
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0347671079
PISSN: 1070664X
EISSN: None
Source Type: Journal
DOI: 10.1063/1.873421 Document Type: Article |
Times cited : (20)
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References (24)
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