Towards Modular Integrated Sensors: The Development of Artificial Haircell Sensors Using Efficient Fabrication Methods

IEEE International Conference on Intelligent Robots and Systems

Volumn 3, Issue , 2003, Pages 2341-2346

  Chen, Jack ^a   Fan, Zhifang ^a   Engel, Jonathan ^a   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARTIFICIAL HAIRCELLS (AHC);

ARTIFICIAL INTELLIGENCE; FLOW OF WATER; GYROSCOPES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; ROBOT APPLICATIONS; WIND TUNNELS;

MICROSENSORS;

EID: 0347409415     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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