Deposition of Ternary Boron-Carbon-Nitrogen (BCN) Layers by Thermal Decomposition of Tris(dimethylamino)boran

New Diamond and Frontier Carbon Technology

Volumn 10, Issue 4, 2000, Pages 181-189

  Aigner, Kurt ^a   Tang, Xinhe ^a   Haubner, Roland ^a   Lux, Benno ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

BCN layers; Hot filament deposition; Ta filaments

Indexed keywords

EID: 0347367378     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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