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Volumn 8, Issue 2, 2002, Pages 52-55

Growth of trumpet-like protrusions during the CVD of silicon carbide films

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EID: 0346985956 PISSN: 09481907 EISSN: None Source Type: Journal
DOI: 10.1002/1521-3862(20020304)8:2<52::AID-CVDE52>3.0.CO;2-R Document Type: Article

Times cited : (3)

References (16)

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